Local-gated single-walled carbon nanotube field effect transistors assembled by AC dielectrophoresis

Abstract

We present a simple and scalable technique for the fabrication of solution processed & local gated carbon nanotube field effect transistors (CNT-FETs). The approach is based on directed assembly of individual single wall carbon nanotube from dichloroethane via AC dielectrophoresis (DEP) onto pre-patterned source and drain electrodes with a local aluminum gate in the middle. Local-gated CNT-FET devices display superior performance compared to global back gate with on-off ratios 10^4 and maximum subthreshold swings of 170 mV/dec. The local bottom-gated DEP assembled CNT-FETs will facilitate large scale fabrication of complementary metal-oxide-semiconductor (CMOS) compatible nanoelectronic devices.