Coupled-Resonator Optical Near-Field Lithography

Abstract

The problem of pattern formation in resonantly-enhanced near-field lithography by the use of dielectric or plasmonic planar resonators is investigated. Sub-diffraction-limited bright or dark spots can be produced by taking advantage of the rotational invariance of planar resonators. To increase the spatial bandwidth of the resonant enhancement, an array of coupled planar resonators can open up a band of Bloch resonances, analogous to coupled-resonator optical waveguides.