Estimates on Pull-in Distances in MEMS Models and other Nonlinear Eigenvalue Problems
Abstract
Motivated by certain mathematical models for Micro-Electro-Mechanical Systems (MEMS), we give upper and lower L∞ estimates for the minimal solutions of nonlinear eigenvalue problems of the form - u = λ f(x) F(u) on a smooth bounded domain in N. We are mainly interested in the pull-in distance, that is the L∞-norm of the extremal solution u* and how it depends on the geometry of the domain, the dimension of the space, and the so-called permittivity profile f. In particular, our results provide mathematical proofs for various observed phenomena, as well as rigorous derivations for several estimates obtained numerically by Pelesko P, Guo-Pan-Ward GPW and others in the case of the MEMS non-linearity F(u)=1(1-u)2 and for power-law permittivity profiles f(x)=|x|α.