Photonic Crystal Cavities in Silicon Dioxide
Abstract
One dimensional nano-beam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 104 are found via simulation, while quality factors of over 5*103 are found in experiment, for cavities with mode volumes of 2.0 cubic wavelengths (in oxide) and in the visible wavelength range (600-716nm). The dependences of the cavity quality factor and mode volume for different design parameters are also considered.
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