Kinetic Monte Carlo simulation of shape transition in strained quantum dots

Abstract

The pyramid-to-dome transition in GexSi1-x on Si(100) initiated by step bunching on pyramidal quantum dots is atomistically simulated using a novel multi-state lattice model incorporating effective surface reconstructions. Results are explained by a simple theory based on a shallow island approximation. Under given deposition conditions in d dimensions, the shape transition is shown to occur at island size nc following nc1/d x-ζ independent of temperature and deposition rate, where ζ 2 and x is the actual Ge concentration in the island. The transition has an energy barrier dominated by the facet interface energy. Fast deposition however can out-run and delay the transition to larger island sizes.

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