Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

Abstract

With an implicit Particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show sophisticating relations with the electrode areas. Two-dimensional kinetic effects are also illuminated. Compare to the fluid mode, PIC/MC model is numerical-diffusion-free and thus finer properties of the plasmas are simulated.