Damping of Nanomechanical Resonators
Abstract
We study the transverse oscillatory modes of nanomechanical silicon nitride strings under high tensile stress as a function of geometry and mode index m <= 9. Reproducing all observed resonance frequencies with classical elastic theory we extract the relevant elastic constants. Based on the oscillatory local strain we successfully predict the observed mode-dependent damping with a single frequency independent fit parameter. Our model clarifies the role of tensile stress on damping and hints at the underlying microscopic mechanisms.
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