Characteristics of the Sculptured Cu Thin Films and Their Optical Properties as a function of deposition rate

Abstract

Sculptured copper thin films were deposited on glass substrates, using different deposition rates. The nano-structure and morphology of the films were obtained, using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). Their optical properties were measured by spectrophotometry in the spectral range of 340-850 nm. The Scot package was used for modeling the film structure and fitting the calculated optical transmittance results to the experimental data and obtaining, both real and imaginary refractive indices, film thickness and fraction of metal inclusion in the film structure.