Design, development and validation of electron ionisation models for nano-scale simulation

Abstract

Two theory-driven models of electron ionization cross sections, the Binary-Encounter-Bethe model and the Deutsch-M\"ark model, have been design and implemented; they are intended to extend the simulation capabilities of the Geant4 toolkit. The resulting values, along with the cross sections included in the EEDL data library, have been compared to an extensive set of experimental data, covering more than 50 elements over the whole periodic table.