Synthesis of nanocrystalline titanium nitride coatings from the plasma of a composite-cathode arc discharge

Abstract

Experimental data are given on the structure and properties of nanocrystalline hardening coatings of titanium nitride doped with copper, produced by plasma-assisted vacuum arc deposition by evaporating powder cathodes. A model of nanostructurization of this type of coatings is proposed. According to the model, the nanocrystallization in these materials is due to the dopant atoms, which form an amorphous sheath around a crystallite, thus defining its size.