Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation

Abstract

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated.