Laser and pinching discharge plasmas spectral characteristics in water window region 2

Abstract

Water window emission spectra of two laboratory nitrogen plasma sources were examined with a free standing grating spectrometer (FSGS). The highest line intensities at the wavelength 2.88 nm achievable with the sources were compared. Pulse energies for this line were judged as 0.02 mJ/srad and 0.16 mJ/srad with laser produced plasma system and pinching discharge plasma, respectively. The spectral resolution was found about 0.01 nm at 3rd order of spectral lines around wavelength 2.5 nm.