Growth of thin graphene layers on stacked SiC surface in ultra high vacuum

Abstract

We demonstrate a technique to produce thin graphene layers on C-face of SiC under ultra high vacuum conditions. A stack of two SiC substrates comprising a half open cavity at the interface is used to partially confine the depleted Si atoms from the sample surface during the growth. We observe that this configuration significantly slows the graphene growth to easily controllable rates on C-face SiC in UHV environment. Results of low-energy electron diffractometry and Raman spectroscopy measurements on the samples grown with stacking configuration are compared to those of the samples grown by using bare UHV sublimation process.