Electret-based cantilever energy harvester: design and optimization
Abstract
We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations of such a device and its implementation using Finite Elements (FEM) and Matlab in order to get an accurate model. This model is then used in an optimization process. A macroscopic prototype (3.2cm2) was built with a silicon cantilever and a Teflon electret. Thanks to this prototype, we manage to harvest 17μW with ambient-type vibrations of 0.2g on a load of 210M. The experimental results are consistent with simulation results.
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