Nanoscale Plasmonic and Optical Modulators Based on Transparent Conducting Oxides

Abstract

Recent experiments showed that unity-order index change in a transparent conducting oxide (TCO) can be achieved in a metal-oxide-semiconductor (MOS) structure by accumulation charge. However, the ultrathin (~5nm) accumulation layer and inherent absorption of TCOs impede the practical applications of this effect. Herein, we propose and explore a novel waveguide, namely "TCO-slot waveguide", which combines both the tunable property of a TCO and field enhancement of a slot waveguide. In particular, light absorption can be sharply enhanced when the slot dielectric constant is tuned close to zero. Based on TCO-slot waveguides, efficient electro-absorption modulation can be achieved within 200 nm with small insertion loss.