Polygonal silica toroidal microcavity for controlled optical coupling

Abstract

We fabricated polygonal silica toroidal microcavities to achieve stable mechanical coupling with an evanescent coupler such as a tapered fiber. The polygonal cavity was fabricated by using a combination of isotropic etching, anisotropic etching and laser reflow. It offers both high and low coupling efficiencies with the cavity mode even when the coupler is in contact with the cavity, which offers the possibility of taking the device outside the laboratory. A numerical simulation showed that an octagonal silica toroidal microcavity had an optical quality factor of 8.8\times10^6.