Stucture and Quality of Mono- and Bi-Component Films, Formed From Ion-Plasma Streams, Transformated During the Interaction with the Condactive Target

Abstract

The essence of the method of transformation of ion-plasma streams was disclosed. A phenomenological model of binary alloy films formation was suggested, in the case of a conducting target being sputtered by ions of nongaseous substances. By example of Nb films formation and Nb-Sn system, the effect of kinetic and thermodynamic parameters on the formation processes of mono- and bi-component films, in the framework of the used method, were studied. The range of energies of condensing particles, within which form highly stable mono-component films and coatings, was specified. The mechanisms of condensation-induced and radiation-induced diffusion were compared, indicating the energy ranges, which determine a predominant implementation of the vacancy or interstitial mechanism of condensation-induced diffusion.