Device model of silicon nanowire bioFETs

Abstract

A device model of biological molecule sensors based on semiconductor nanowires has been developed. This model of a bioFET is based on the concept of the electrolytic absolute electrode potential. From that starting point a semiconductor device model of the nanowire solution biomolecule system was derived. The model includes the Gouy-Chapman-Stern model of the salt solution double layer, site binding charges on the electrode surface, and biological molecules in the form of a membrane layer. A simple method of solving this model is presented using the finite element method. Some examples showing the general properties of the model are given.