Effects of coating rate on morphology of copper surfaces

Abstract

We have used standard fractal analysis and Markov approach to obtain further insights on roughness and multifractality of different surfaces. The effect of coating rates on generating topographic rough surfaces in copper thin films with same thickness has been studied using atomic force microscopy technique (AFM). Our results show that by increasing the coating rates, correlation length (grain sizes) and Markov length are decreased and roughness exponent is decreased and our surfaces become more multifractal. Indeed, by decreasing the coating rate, the relaxation time of embedding the particles is increased.