Experimental demonstration of broadband absorption enhancement in partially aperiodic silicon nanohole structures
Abstract
We report the design, fabrication, and optical absorption measurement of silicon membranes patterned with partially aperiodic nanohole structures. We demonstrate excellent agreement between measurement and simulations. We optimize a partially aperiodic structure using a random walk algorithm and demonstrate an experimental broadband absorption of 4.9 times that of a periodic array.
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