Texture of ZnO thin films deposited through microwave irradiation

Abstract

We report the crystallographic texture of ZnO thin films comprising nanorods grown by a microwave irradiation assisted method. Different substrates were used, namely Si, Ge, metal coated Si, PMMA coated Si and ITO coated glass, to examine the respective development of crystallographic texture. The films were characterized by Xray diffraction and scanning electron microscopy, while the texture analysis was done by Xray pole figure analysis using the Schultz reflection method. The ZnO film deposited on Si and Ge showed a mixed texture. On all the other substrates, c axis oriented ZnO films were obtained.