Counter operation in nonlinear micro-electro-mechanical resonators

Abstract

This paper discusses a logical operation of multi-memories that consist of coupled nonlinear micro-electro-mechanical systems (MEMS) resonators. A MEMS resonator shows two coexisting stable states when nonlinear responses appear. Previous studies addressed that a micro- or nano-electrical-mechanical resonator can be utilized as a mechanical 1-bit memory or mechanical logic gates. The next phase is the development of logic system with coupled multi-resonators. From the viewpoint of application of nonlinear dynamics in coupled MEMS resonators, we show the first experimental success of the controlling nonlinear behavior as a 2-bit binary counter.