Electronic stopping power of hydrogen in a high-k material at the stopping maximum and below

Abstract

Electronic energy loss of hydrogen ions in HfO2 was investigated in a wide energy range in the medium and low energy ion scattering regime. Experiments by Time-Of-Flight Medium-Energy Ion Scattering (TOF-MEIS) with proton and deuteron projectiles were performed in backscattering geometry for nm-films of HfO2 on Si with an ultrathin SiO2 interface layer prepared by ALD. At energies around the stopping maximum excellent agreement is found with earlier results from Behar et al. (Phys. Rev. A 80 (2009) 062901) and theoretical predictions. Towards lower energies discrepancies between experiment and calculations increase slightly. The low energy data exhibits excellent velocity proportionality and indicates the absence of clear effects due to distinct electronic states. Thus, also no apparent velocity threshold can be predicted within the experiments uncertainty from the present data. The magnitude of the energy loss is discussed in terms of a free-electron model and compared with the expected electron densities from plasmon frequencies.