Transformation process of the magnetron-sputtered Ag2O film in hydrogen annealing

Abstract

The current paper mainly addresses the effect of the hydrogen partial pressure on the microstructure and transformation of the Ag2O film. The transformation process and mechanism were also analyzed in detail. Increasing the hydrogen partial pressure can accelerate the transformation of Ag2O to Ag and lower the critical transformation temperature of the film due to the enhanced hydrogen reduction, and to both of the lowered activation energy of the reaction of Ag2O with hydrogen and enhanced lattice strain of the Ag2O film, respectively. Hydrogen-involved reaction in the whole hydrogen annealing process is mainly hydrogen reduction reaction with Ag2O. The diffusion of hydrogen and gaseous H2O molecules is accompanied with the whole hydrogen annealing process.

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