Electrical, Optical and Structural Properties of Improved Transparent Conductive Oxide TCO Films
Abstract
High Frequency (GW) Post Processing of Transparent Conductive Oxide, ITO, leads to a significant improvement of Optical Transmission and Electrical Conduction. This is also true in case of ITO films in multilayered structures. The improvements happen without any affecting the lower layers (other layers of the multilayered Device). This Method is extremely selective and can process only the targeted film (layer).
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