Ultra-Sensitive Chip-Based Photonic Temperature Sensor Using Ring Resonator Structures

Abstract

Resistance thermometry provides a time-tested method for taking temperature measurements. However, fundamental limits to resistance-based approaches has produced considerable interest in developing photonic temperature sensors to leverage advances in frequency metrology and to achieve greater mechanical and environmental stability. Here we show that silicon-based optical ring resonator devices can resolve temperature differences of 1 mK using the traditional wavelength scanning methodology. An even lower noise floor of 80 microkelvin for measuring temperature difference is achieved in the side-of-fringe, constant power mode measurement.