Eliminating Structural Loss in Optomechanical Resonators Using Elastic Wave Interference

Abstract

Optomechanical resonators suffer from the dissipation of mechanical energy through the necessary anchors enabling the suspension of the structure. Here we show that such structural loss in an optomechnaical oscillator can be almost completely eliminated through the destructive interference of elastic waves using dual-disk resonators. We also present both analytical and numerical model that predicts the observed interference of elastic waves. Our experimental data reveal unstressed SiN devices with mechanical Q-factors up to $10^4$ at mechanical frequencies of $f=102$ MHz ($fQ = 10^{12}$) at room temperature.