On the density limit in the helicon plasma sources

Abstract

Existence of the density limit in the helicon plasma sources is critically revisited. The low- and high-frequency regimes of a helicon plasma source operation are distinguished. In the low-frequency regime with $\omega < \sqrt{\omega_{ci}\omega_{ce}}$ the density limit is deduced from the Golant-Stix criterion of the accessibility of the lower hybrid resonance. In the high-frequency case, $\omega > \sqrt{\omega_{ci}\omega_{ce}}$, an appropriate limit is given by the Shamrai-Taranov criterion. Both these criteria are closely related to the phenomenon of the coalescence of the helicon wave with the Trivelpiece-Gould mode. We argue that theoretical density limits are not achieved in existing devices but might be met in the future with the increase of applied rf power.