Probing Properties of Cold Radiofrequency Plasma with Polymer Probe

Abstract

The probe intended for the characterization of cold plasma is introduced. The probe allows estimation of the Debye length of the cold plasma. The probe is based on the pronounced modification of surface properties (wettability) of polymer films by cold plasmas. The probe was tested with the cold radiofrequency inductive air plasma discharge. The Debye length and the concentration of charge carriers were estimated for various gas pressures. The reported results coincide reasonably with the corresponding values established by other methods. The probe makes possible measurement of characteristics of cold plasmas in closed chambers.