Precision and Accuracy Testing of FMCW Ladar Based Length Metrology

Abstract

The calibration and traceability of high resolution frequency modulated continuous wave (FMCW) ladar sources is a requirement for their use in length and volume metrology. We report the calibration of a FMCW ladar length measurement system by use of spectroscopy of molecular frequency references HCN (C-band) or CO (L-band) to calibrate the chirp rate of the FMCW source. Propagating the stated uncertainties from the molecular calibrations provided by NIST and measurement errors provides an estimated uncertainty of a few ppm for the FMCW system. As a test of this calibration, a displacement measurement interferometer with a laser wavelength close to that of our FMCW system was built to make comparisons of the relative precision and accuracy. The comparisons performed show ppm agreement which is within the combined estimated uncertainties of the FMCW system and interferometer.