Probing the magnetic moment of FePt micromagnets prepared by Focused Ion Beam milling

Abstract

We investigate the degradation of the magnetic moment of a 300 nm thick FePt film induced by Focused Ion Beam (FIB) milling. A $1~\mu \mathrm{m} \times 8~\mu \mathrm{m}$ rod is milled out of a film by a FIB process and is attached to a cantilever by electron beam induced deposition. Its magnetic moment is determined by frequency-shift cantilever magnetometry. We find that the magnetic moment of the rod is $\mu = 1.1 \pm 0.1 \times 10 ^{-12} \mathrm{Am}^2$, which implies that 70% of the magnetic moment is preserved during the FIB milling process. This result has important implications for atom trapping and magnetic resonance force microscopy (MRFM), that are addressed in this paper.