Metallic multilayers for X-band Bragg reflector applications
Abstract
We present a structural and high frequency (8.72GHz) electrical characterization of sputter deposited Ti/W, Ti/Ru and Mo/Ti metallic multilayers for potential application as acoustic Bragg reflectors. We prove that all metallic multilayers comprised of different acoustic impedance metals such as Ti, W, Mo are promising candidates for Bragg reflector/bottom electrode in full X-band thin film acoustic resonators. Values for high frequency resistivity of the order of 10-8 ohm.m are measured by use of a contact-free/non-invasive sheet resistance method.
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