Plackett-Burman experimental design for pulsed-DC-plasma deposition of DLC coatings

Abstract

The influence of technological parameters of pulsed-DC chemical vapour deposition on the deposition rate, the mechanical properties and the residual stress of diamond-like carbon (DLC) coatings deposited onto a martensitic steel substrate, using a Ti buffer layer between coating and substrate, has been studied. For this purpose, a Plackett-Burman experiment design and Pareto charts were used to identify the most significant process parameters, such as deposition time, methane flux, chamber pressure, power, pulse frequency, substrate roughness and thickness of titanium thin film. The substrate surfaces, which were previously cleaned by argon plasma, and the DLC coatings were characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The mechanical properties (elastic modulus and hardness) and the residual stress of DLC coatings were determined by the nanoindentation technique and calotte grinding method, respectively. Finally, the causes of the relative effect of different process variables were discussed.