On-Chip Silicon Waveguide Bragg Grating Photonic Temperature Sensor

Abstract

Resistance thermometry is a time-tested method for taking temperature measurements. In recent years fundamental limits to resistance-based approaches spurred considerable interest in developing photonic temperature sensors as a viable alternative. In this study we demonstrate that our photonic thermometer, which consists of a silicon waveguide integrated with a Bragg grating, can be used to measure temperature changes over the range from 5 C to 160 C with a combined expanded uncertainty [k = 2 ; 95% confidence level] of 1.25 degree C. The computational modeling of the sensor predicts the resonance wavelength and effective refractive index within 4% of the measured value.