Junction-Less Monolayer MoS2 FETs

Abstract

This paper introduces monolayer molybdenum disulfide (MoS2) based junction-less (JL) field-effect transistor (FET) and evaluates its performance at the smallest foreseeable (5.9 nm) transistor channel length as per the International Technology Roadmap for Semiconductors (ITRS), by employing rigorous quantum transport simulations. By comparing with MoS2 based conventional FETs, it is found that the JL structure naturally lends MoS2 FETs with superior device electrostatics, and higher ON-current for both high-performance and low-standby-power applications, especially at high impurity doping densities. Along with the advantages of the MoS2 JL-FETs, the effects of impurity scattering induced carrier mobility degradation of JL-FETs is also highlighted as a key technological issue to be addressed for exploiting their unique features.