Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin films

Abstract

Highly-ordered and spatially-coherent cobalt slanted columnar thin films were deposited by glancing angle deposition onto silicon substrates, and subsequently oxidized by annealing at 475 $^{\circ}$C. Scanning electron microscopy, Raman scattering, generalized ellipsometry, and density functional theory investigations reveal shape-invariant transformation of the slanted nanocolumns from metallic to transparent metal-oxide core-shell structures with properties characteristic of spinel cobalt oxide. We find passivation of Co-SCTFs yielding CoAl$_2$O$_3$ core-shell structures produced by conformal deposition of a few nanometers of alumina using atomic layer deposition fully prevents cobalt oxidation in ambient and from annealing up to 475 $^{\circ}$C.