Mutual Radiation Impedance of Uncollapsed CMUT Cells with Different Radii
Abstract
A polynomial approximation is proposed for the mutual acoustic impedance between uncollapsed capacitive micromachined ultrasonic transducer (CMUT) cells with different radii in an infinite rigid baffle. The resulting approximation is employed in simulating CMUTs with a circuit model. A very good agreement is obtained with the corresponding finite element simulation (FEM) result.
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