New approach to exact extraction of piezoresistance coefficient

Abstract

The extension of piezoresistance coefficient extraction method was proposed, for protection from errors in estimation of the thickness of the test structure membrane. This new approach requires finding models of elements of matrix of integrated stresses as functions of the membrane thickness. Additionally, two test structures with different thickness of the membrane have to be used. This improved method gives the more credible estimation of piezoresistance coefficients $\pi_L$ and $\pi_T$ and the thickness of the membranes of the used test structures.