High Speed and High Resolution Table-Top Nanoscale Imaging

Abstract

We present a table-top coherent diffraction imaging (CDI) experiment based on high-order harmonics generated at 18 nm by a high average power femtosecond fiber laser system. The high photon flux, narrow spectral bandwidth and high degree of spatial coherence allow for ultra-high sub-wavelength resolution imaging at a high numerical aperture. Our experiments demonstrate a half-pitch resolution of 13.6 nm, very close to the actual Abbe-limit of 12.4 nm, which is the highest resolution achieved from any table-top XUV or X-ray microscope. In addition, 20.5 nm resolution was achieved with only 3 sec of integration time bringing live diffraction imaging and 3D tomography on the nanoscale one step closer to reality. The current resolution is solely limited by the wavelength and the detector size. Thus, table-top nanoscopes with only a few-nm resolutions are in reach and will find applications in many areas of science and technology.