Quality factor enhancement of Nano electromechanical systems by capacitive driving beyond the resonance
Abstract
Nano electromechanical systems are considered as ultra sensitive devices for mass and force detection. Capacitive actuation is widely used in these devices but is known to degrade the quality factor of the resonator due to DC electrostatic damping. We report the enhancement of the quality factor of SiC vibrating nanowires detected nano optomechanically and electrically by applying an AC capacitive driving at a frequency above both the resonance frequency and the electrical cutoff frequency. Self-oscillations are demonstrated for optimal conditions. We developed an analytical model of the phenomenon and showed that it can lead to an improvement of the force sensitivity. * anthony.ayari@univ-lyon1.fr 1
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