Nanoscale force sensor and actuator with carbon-nanotube network

Abstract

Actuators at the nanoscale are assuming great important in todays shrinking electronics industry where a system-on-chip approach is used to integrate multi-functional systems and devices. Integration of sensors, actuators, information processing, and storage have become extremely important, more so at the sub-micrometer scale. Here we utilized vertically aligned carbon nanotube forests bonded onto a piezoelectric substrate to provide sensing of nanoscale forces and actuation on the same platform. This is a demonstration of integration of two important functions using the functionality of nanomaterials. This has immediate utility in many areas including outer space exploration, portable consumer electronics, embedded systems, etc.