Optomechanical characterization of silicon nitride membrane arrays

Abstract

We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging from 8.5 to 200 $\mu$m. Their optical properties are accurately determined using a combination of broadband and monochromatic illuminations and the lowest vibrational mode frequencies and mechanical quality factors are determined interferometrically. The results and techniques demonstrated are promising for investigations of collective phenomena in optomechanical arrays.