Modeling Study of Laser Beam Scattering by Defects on Semiconductor Wafers

Abstract

Accurate modeling of light scattering from nanometer scale defects on Silicon wafers is critical for enabling increasingly shrinking semiconductor technology nodes of the future. Yet, such modeling of defect scattering remains unsolved since existing modeling techniques fail to account for complex defect and wafer geometries. Here, we present results of laser beam scattering from spherical and ellipsoidal particles located on the surface of a silicon wafer. A commercially available electromagnetic field solver (HFSS) was deployed on a multiprocessor cluster to obtain results with previously unknown accuracy down to light scattering intensity of -170 dB. We compute three dimensional scattering patterns of silicon nanospheres located on a semiconductor wafer for both perpendicular and parallel polarization and show the effect of sphere size on scattering. We further computer scattering patterns of nanometer scale ellipsoidal particles having different orientation angles and unveil the effects of ellipsoidal orientation on scattering.