Biosensing using Functionally Graded Piezoelectric MEMS Resonators

Abstract

Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to shift the primary resonance of the micro-resonator. The governing equation of motion is derived by minimization of the Hamiltonian and generalized to the viscously damped systems. The periodic solutions in the vicinity of the primary resonance are detected and their stability is investigated. The basins of attraction conforming to three individual periodic orbits are determined. The outcomes show that the higher the amplitude of the periodic orbit, the smaller is the area of the attractor.