Functional Zr, α-Ta, and (α-eta) Ta thick coatings obtained by original arc-evaporator

Abstract

Novel plasma-clustered deposition technique, called PVD Droplets, as well as its main principles of operation were described. New types of obtained thick, over 20 μm, functional coatings basing on Ta and Zr have been presented. Results of research in physic-chemical properties of the coating materials are listed including preliminary studies of superconductive properties. Comparative evaluation between of obtained coatings and sample CVD coating was made.

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