On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency

Abstract

The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor integrability. We show a universal on-chip transduction scheme, which can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip MEMS/NEMS for any resonator.