Modified Stoney's equation with anisotropic substrates undergoing large deformations

Abstract

Residual stresses in a thin film deposited on a substrate results in a curvature of the system, which can be measured using the well known Stoney equation. Isotropic elasticity of the substrate along with infinitesimal strains and rotations are two important assumptions used in the derivation of the Stoney equation. However, the transverse deflection in the substrate contributes significantly to the extensional strain in its plane, leading to non-linearity in its deformation. Moreover, Silicon wafers are predominantly used as substrate materials to measure the curvature of the system. In this paper, relations between normalized substrate curvature and normalized thin film mismatch are derived in the non-linear deformation regime, for substrates made of single crystal Si(001) and Si(111) wafers. Numerical results of curvature of thin film configurations with Si(001) and Si(111) wafer substrates, undergoing large deformations are presented and discussed.