Cross Sections for Electron Collisions with NF$_3$

Abstract

Cross section data are compiled from the literature for electron collisions with nitrogen trifluoride (NF$_3$) molecules. Cross sections are collected and reviewed for total scattering, elastic scattering, momentum transfer, excitations of rotational and vibrational states, dissociation, ionization, and dissociative attachment. For each of these processes, the recommended values of the cross sections are presented. The literature has been surveyed up to the end of 2016.