Microscale resolution thermal mapping using a flexible platform of patterned quantum sensors

Abstract

Temperature sensors with micro- and nanoscale spatial resolution have long been explored for their potential to investigate the details of physical systems at an unprecedented scale. In particular, the rapid miniaturization of transistor technology, with the associated steep boost in power density, calls for sensors that accurately monitor heating distributions. Here, we report on a simple and scalable fabrication approach, based on directed self-assembly and transfer printing techniques, to construct arrays of nanodiamonds containing temperature sensitive fluorescent spin defects. The nanoparticles are embedded within a low thermal conductivity matrix that allows for repeated use on a wide range of systems with minimal spurious effects. Additionally, we demonstrate access to a wide spectrum of array parameters ranging from sparser single particle arrays to denser devices with approximately 100 % yield and stronger photoluminescence signal, ideal for temperature measurements. With these we experimentally reconstruct the temperature map of an operating coplanar waveguide to confirm the accuracy of these platforms.