Calibrating torsional eigenmodes of micro cantilevers for dynamic measurement of frictional forces

Abstract

Non-invasive thermal noise calibration of both torsional and flexural eigenmodes is performed on numerous cantilevers of 10 different types. We show that for all tipless and short-tipped cantilevers, the ratio of torsional to flexural mode stiffness is given by a constant, times the ratio of their resonant frequencies. By determining this constant we enable a calibration of the torsional eigenmode, starting from a calibration of the flexural eigenmode. Our results are well motivated from beam theory and we verify them with finite element simulation.